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    • 专利摘要:
    The invention relates to an electromagnetic radiation detector comprising: at least one membrane (108) suspended above a substrate (101); and a hood (110) closing a hermetic cavity (115) receiving the at least one membrane. According to the invention: the cover (110) has a thickness (E) of less than or equal to 10 μm; the cover is supported at least on support walls (106) flanking the membrane (s); and the detector has first and second metal sealing layers (112A, 112B) interposed on one another between the cover and the support walls, and between which a peripheral bonding zone extends ( 112C). The invention also relates to a method of manufacturing such a detector. The invention provides a solution for encapsulation by a thin cap, wherein the membranes are not subjected to high temperatures.
    公开号:FR3066044A1
    申请号:FR1753843
    申请日:2017-05-02
    公开日:2018-11-09
    发明作者:Patrick Leduc；Jean-Jacques Yon
    申请人:Commissariat a lEnergie Atomique CEA；Commissariat a lEnergie Atomique et aux Energies Alternatives CEA；
    IPC主号:
    专利说明:

    ELECTROMAGNETIC RADIATION DETECTOR, ENCAPSULATED BY THIN FILM DEFERRATION
    DESCRIPTION
    TECHNICAL FIELD The invention relates to the field of encapsulation of the sensitive element (s) of an electromagnetic detector, for placing this or this sensitive element (s) inside a 'a closed cavity.
    Each sensitive element is here a membrane, suspended above a substrate, to absorb electromagnetic radiation and convert it into heat.
    The closed cavity, preferably under vacuum, guarantees good thermal insulation between the membrane (s), and the substrate.
    PRIOR STATE OF THE ART
    Various solutions are known in the prior art for encapsulating the suspended membrane (s) of an electromagnetic detector of the micro-bolometer detector type.
    In document US 2004/0140570, the deposition of a thick cover is described above the pixels of a matrix detector, in order to close a cavity. The thickness of the cover is 500 µm, with trenches in which this thickness is only 100 µm.
    Gas exhaust openings are drilled in the hood, at the level of the trenches.
    Such a cover however has several drawbacks.
    First, because of its large thickness, it has a reduced transmission, since part of the optical signal is absorbed when crossing the cover. This requires the use of high optical quality materials and therefore relatively expensive.
    Secondly, the trenches should not be above the sensitive elements of the detector, so as not to disturb the detection.
    They are therefore positioned on the periphery of these sensitive elements, which increases the total size of the detector with its cover.
    In addition, because of its large thickness, the cover complicates access to the electrical connection pads, called "bonding pads", arranged at the edge of the detector pixels and ensuring connection with additional electronic devices. Access to the electrical connection pads is only obtained by etching the entire thickness of the cover. In addition to the difficulty of carrying out this etching step, the large thickness of the cover means that the bonding pads have to be moved away from the edge of the cover in order to be able to carry out the wirebonding step (interconnection), which increases the size of the detector. Other methods of producing a cover are known, implementing a thin layer deposition on a sacrificial layer surrounding the membranes of an electromagnetic detector of the micro-bolometer detector type.
    Such a process is described for example in patent application FR 2 966 595.
    It is thus possible to obtain a cover of reduced thickness, and without a trench.
    A disadvantage of this solution is however that the step of depositing a thin layer can involve temperatures liable to deteriorate the sensitive elements of the detector.
    An objective of the present invention is to provide a solution for encapsulating at least one membrane suspended from an electromagnetic radiation detector, which does not have the drawbacks of the prior art.
    STATEMENT OF THE INVENTION
    This objective is achieved with a method of encapsulating at least one sensitive element of an electromagnetic radiation detector, comprising the following steps: a) making a stack, called sensor stack, comprising: a first substrate, said substrate main ; at least one membrane extending over the main substrate, forming the at least one sensitive element of the electromagnetic radiation detector, and configured to absorb and convert incident electromagnetic radiation into heat; support walls, extending above the main substrate and framing the at least one membrane; and a first sealing layer, metallic, situated above the upper faces of the support walls, on the side opposite to the main substrate; b) deposition, above a second substrate called transfer substrate, of a layer called cover layer, transparent in a spectral sensitivity range of the electromagnetic radiation detector, and of thickness less than or equal to 10 μm; c) production, on the cover layer, of a second sealing layer, metallic; d) transfer of the transfer substrate to the main substrate, so as to align and bond one to the other, the first and the second sealing layers; and e) removing the transfer substrate.
    An electromagnetic radiation detector is thus produced comprising: at least one membrane, suspended above a substrate, configured to absorb and convert incident electromagnetic radiation into heat; and a cover, transparent in a spectral sensitivity range of the electromagnetic radiation detector, and closing a hermetic cavity receiving the at least one membrane; and in which: the cover has a thickness less than or equal to 10 μm; the cover is suspended above the substrate, bearing at least on support walls framing the membrane (s); and the detector has first and second sealing layers, metallic, interposed one on the other between the cover and the support walls, and between which extends a peripheral bonding zone.
    The substrate of the electromagnetic radiation detector corresponds to the main substrate, cited in the process statement. The basic idea of the invention is to produce a cover by depositing a thin layer on a transfer substrate, distinct from the substrate receiving the membrane (s) of the electromagnetic radiation detector.
    Thus, no particular precaution is required for the deposition of thin layer, this not being carried out directly above the at least one membrane of the electromagnetic radiation detector. The invention therefore offers a solution for encapsulation by a thin cover, in which the membrane (s) are not subjected to high temperatures (the temperature remains below 400 ° C., or even even below 300 ° C., during of the encapsulation process).
    The thin layer in which the cover is produced is not handled alone, but jointly with the transfer substrate. It can thus have a reduced thickness, less than or equal to 10 μm and even more preferably less than or equal to 5 μm. This small thickness prevents the absorption of incident signal by the cover.
    The small thickness of the cover facilitates the production of small openings for the evacuation of gases, or vents, and does not require trenches.
    In addition, the electromagnetic radiation detector can thus provide easy access to the electrical connection pads, and a minimal space requirement.
    The method according to the invention uses the bonding of a second sealing layer on a first sealing layer, to secure the thin layer formed on the transfer substrate, the remainder of the electromagnetic radiation detector. These two sealing layers, superimposed and glued to one another, are therefore characteristic of the invention.
    The detector according to the invention can, moreover, have one or more of the characteristics below.
    The cover can be suspended above the substrate, resting on the support walls, and on support pillars located between the support walls, the detector then comprising pairs of first and second sealing studs, metallic, each pair being located between the cover and one of the support pillars, the first and second sealing studs of each pair being superimposed and separated by a respective internal bonding area.
    The detector may have a plurality of membranes suspended above the substrate, a distribution pitch of the membranes being equal to a distribution pitch of the support pillars, in each dimension of the plane of the substrate.
    The membrane (s) can be suspended above the substrate, each bearing on support pillars, and for each membrane, one of the support pillars is surmounted by a pair of first and second sealing studs, so that said support pillar also forms a support pillar for the cover.
    The cover may have one or more through opening (s).
    The membrane (s) can be suspended above the substrate, each bearing on support pillars, and for each membrane, one of the support pillars is surmounted by a through opening of the cover.
    A cumulative thickness of the first and second sealing layers can be between 1.5 μm and 2.5 μm.
    In the same way, the method according to the invention can, moreover, have one or more of the characteristics below. The sensor stack may also include support pillars, extending between the support walls, and each surmounted by a respective first sealing stud, step c) also comprising the production, on the cover layer, of second sealing studs, and step d) also performing alignment and bonding, two by two, of the first sealing studs with the second sealing studs.
    The method may further comprise a step of etching the cover layer, to delimit the external contour of a cover intended to close a cavity receiving the at least one membrane, and to form in this cover at least one through opening. The step of etching the cover layer can be implemented after step e) of removing the transfer substrate. The etching step of the cover layer can be implemented after step b) of depositing the cover layer and before step d) of transfer of the transfer substrate, the etching step of the layer the cover being followed by a step of filling the regions etched with a layer of sacrificial material, called the sacrificial cover layer, and the sacrificial cover layer being removed after step e) of removing the transfer substrate.
    The method may comprise steps of depositing layers of sacrificial material, called sacrificial stop layers, so that before step d) of transfer of the transfer substrate, the first sealing layer and the second sealing layer are each located in one of these sacrificial stop layers, step d) implementing a hybrid bonding, and the sacrificial stop layers being removed after step e) of removing the transfer substrate.
    In the sensor stack, at the end of step a), the at least one membrane may extend over a layer of sacrificial material, called sacrificial membrane layer, the sacrificial membrane layer being evacuated after step e) of removal of the transfer substrate.
    The method can be implemented simultaneously for several sensor stacks sharing the same main substrate, and using a single transfer substrate and a single cover layer, a step of etching the cover layer defining the external contours of several covers each intended to cover one of the several sensor stacks.
    BRIEF DESCRIPTION OF THE DRAWINGS
    The present invention will be better understood on reading the description of embodiments given for purely indicative and in no way limiting, with reference to the appended drawings in which: FIG. 1A schematically illustrates, in a sectional view, a detail of a first embodiment of an electromagnetic radiation detector according to the invention; FIG. 1B illustrates schematically and according to a top view, the detector of FIG. IA; FIGS. 2A to 2C schematically illustrate a pixel of a second embodiment of a detector according to the invention, in which a sacrificial layer release vent and a pillar for supporting the cover are placed in a particularly clever manner; FIGS. 3A and 3B illustrate the steps of a method according to the invention, for manufacturing an electromagnetic radiation detector according to the invention; Figures 4 and 5 illustrate two variants of the method illustrated in Figures 3A and 3B; and FIGS. 6A and 6B illustrate the implementation of a method according to the invention, for simultaneously manufacturing several detectors according to the invention.
    DETAILED PRESENTATION OF PARTICULAR EMBODIMENTS
    In the following description, the terms "on", "above", "upper", "under", "below", "lower" refer to the orientation of the corresponding figures.
    For greater clarity, the axes (Ox), (Oy) and / or (Oz) of an orthonormal reference have been shown in some of the figures.
    Figure IA schematically illustrates, and in a sectional view, a detail of an electromagnetic radiation detector according to a first embodiment of the invention.
    Figure IB illustrates this detector schematically, and in a top view.
    The electromagnetic radiation detector 100 is an infrared detector, or tera-Hertz, operating at room temperature.
    It comprises a substrate 101, for example made of silicon, into which are integrated read circuits produced for example in CMOS technology.
    The substrate 101 is covered here with an optional intermediate layer 102, made of an electrically insulating material.
    The intermediate layer 102 is covered here with a thin protective layer 103, optional, which protects the reading circuits during a step of releasing the membrane, if necessary.
    The detector 100 also comprises a matrix of membranes 108, each suspended above the substrate 101.
    The membranes 108 are distributed here in rows and columns above the substrate.
    They each define a pixel of the detector 100.
    Each membrane 108, or suspended board, is made of a material having a strong absorption in the infrared (wavelengths between 0.8 pm and 100 pm) and / or terahertz (wavelengths between 100 pm and 5 mm).
    Each membrane is associated with a thermometric element (not shown), to measure its temperature.
    The thermometric elements of the membranes 108 are electrically connected to the reading circuits of the substrate 101.
    Each thermometric element can be formed by a thermo-resistive element, attached to the membrane, and whose electrical resistance is a function of temperature. The thermometric element then defines, with the membrane, the bolometric plate of a micro-bolometer.
    As a variant, each thermometric element may be formed by a transistor or a diode attached to the membrane, a current in this transistor or this diode being a function of the temperature. If necessary, the membrane can form one of the elements of the transistor (or of the diode). The thermometric element then defines, with the membrane, the suspended plate of a sensor similar to a micro-bolometer, except that the temperature of the membrane results in a variation of a current in a transistor or in a diode, and not a variation of the resistance of a thermo-resistive element.
    In the following, the expression “micro-bolometer type sensor” is used to designate one or the other of these variants.
    We will not describe here in more detail the micro-bolometer type sensors, the latter being well known to those skilled in the art.
    Vertical structures extend in a stage situated between the membranes 108 and the substrate 101. The structures are said to be vertical, because they each extend along the axis (Oz), orthogonal to the plane of the substrate 101. They include: - support walls 106, for supporting a cover as described below; - Support pillars 104, also for supporting the cover; - Support pillars 105, to support membranes 108 as described below, and also serving to electrically connect each membrane with the substrate read circuits; and - elevation blocks 107, on which are formed electrical connection pads.
    Here, the different vertical structures all have the same height H along the vertical axis (Oz), and are made of the same material or the same set of materials.
    They consist for example of silicon, in particular an amorphous silicon or a poly silicon, or of a stack of metallic layers (titanium nitride and copper, or titanium nitride and tungsten, etc.).
    The support pillars 105 each have a diameter D of the order of a micrometer, for example between 0.4 pm and 1.5 pm, in particular 1 pm.
    They each have a horizontal base 1051 which extends in a plane parallel to the substrate, crossing the electrically insulating layer 102.
    Each membrane is supported on at least two support pillars 105.
    The support walls 106 surround the matrix of membranes 108.
    They include here four vertical walls, defining above the substrate 101 a square or rectangular surface. To avoid mechanical stress in 90 ° angles, the number of walls can be increased so as to increase the number of salient angles between the walls (angles greater than 90 °). The support walls then delimit a polygon-shaped surface.
    The support walls 106 here comprise several elementary support walls 1061.
    The elementary support walls 1061 delimit surfaces which are nested one inside the other and which are concentric.
    The elementary so-called internal walls 1061, disposed inside the structure forming the support walls 106, can delimit a surface in a discontinuous manner. On the contrary, the external elementary walls preferably delimit a surface continuously.
    The elementary walls 1061 are spaced from each other, and each have a width L, for example equal to the diameter D.
    The spaces between two neighboring elementary walls 1061 are filled with a so-called sacrificial material 1062, which will not have been removed at the end of the steps for manufacturing the detector 100 according to the invention.
    As a variant, the support walls do not consist of elementary walls between which there is a sacrificial material, but of wide walls.
    The support walls 106 also have a horizontal base 1063 and an upper plate 1064, which each extend in a plane parallel to the substrate.
    The support pillars 104 have for example the same section as the support pillars 105, or a smaller section.
    Here, they each have a horizontal base 1041, and an upper plate 1042, each extending in one piece in a plane parallel to the substrate.
    The support pillars 104 extend inside the volume delimited by the support walls 106.
    They extend here between the membranes 108, according to the same distribution pitch P as the membranes, in each of the dimensions of the plane of the substrate. This step is for example between 5 pm and 17 pm, for example 10 pm.
    According to each of the dimensions of the substrate plane, there are Nx and Ny membranes, and Mx and My support pillars, with for example Mx = Nx and My = Ny (one support pillar per pixel), or Mx = Nx-l and My = Ny-1.
    The distribution pitch of the support pillars 104 can also be a multiple of the pitch P of the membranes, respectively n (x) * P and n (y) * P along the directions x and y, n (x) and n (y) being whole numbers. According to each of the dimensions of the plane of the substrate, there are then Nx and Ny membranes, and Mx and My support pillars, with for example Mx = Nx / n (x) and My = Ny / n (y) (according to each dimension x and y, a pillar of support by n (x), respectively n (y) pixels) or Mx = [Nx / n (x)] - l and My = [Ny / n (y)] - l.
    The support pillars 104 and the support walls 106 participate together in supporting a cover 110.
    The support pillars 104 are not necessarily necessary for detectors having a reduced number of pixels (that is to say here a reduced number of membranes).
    The elevation blocks 107 here comprise several elementary walls or pillars 1071, each having for example a width, respectively a diameter, equal to the diameter D.
    The spaces between two elementary walls or pillars 1071 are filled with a so-called sacrificial material 1072, which will not have been removed at the end of the steps for manufacturing the detector 100 according to the invention.
    As a variant, the raising blocks are not formed by elementary walls or pillars separated by a sacrificial material, but by a wide pillar, of diameter greater than D.
    Here, the elevation blocks 107 each have a horizontal base 1073, and an upper plate 1074, each extending in a plane parallel to the substrate.
    The elevation blocks 107 are each surmounted by an electrical connection pad 109, electrically connected to reading circuits integrated in the substrate 101.
    The electrical connection pads 109, or bonding pads, provide electrical connection points to the reading circuits integrated in the substrate 101, for auxiliary electronic circuits.
    Here, each electrical connection pad 109 extends in direct physical contact with the upper plate 1074 of an elevation block 107.
    The electrical connection pads are for example made of aluminum.
    As illustrated in FIG. 1B, the electrical connection pads extend, for example, in two parallel columns, situated on either side of the membrane matrix, outside the volume delimited by the support walls 106. The pads electrical connection may also be present on all four sides of the die.
    The cover 110 extends in a plane parallel to the substrate 101, and has a constant thickness E of between 0.5 μm and 10 μm limits inclusive, preferably between 0.5 μm and 5 μm limits inclusive, for example 2 μm.
    The cover 110 is transparent to the wavelengths detected by the bolometric type sensors of the detector 100. It has for example a transmission coefficient greater than or equal to 70% at at least one wavelength detected by the detector 100.
    Thanks to its small thickness, the cover can fulfill this condition of transparency, while being made of a material having poor transmission properties. It can for example be made of a material other than high quality silicon. The invention therefore offers great freedom of choice of material for the cover, especially since the latter is deposited without temperature or conformity constraints (see below).
    The cover 110 is made for example of silicon or germanium.
    It extends above the membranes, without protruding up to the top of the connection pads 109. It can however slightly protrude relatively to the support walls 106. The external contours of the cover 110 are shown in dotted lines in FIG. .
    The cover may have textured regions 1101 situated opposite the membranes 108, produced for example by lithography. These textures serve to filter the incident radiation or serve as anti-reflection for the radiation so as to improve the optical transmission to the membrane 108.
    The cover 110 also has through openings 1102, or vents, or holes.
    Each through opening 1102 is for example of rectangular or oblong shape, where the small dimension is less than 0.8 µm, for example about 0.5 µm. It is also possible to provide, as described below, circular through openings whose diameter is less than 0.8 pm, for example 0.5 pm.
    They are distributed regularly above the substrate, preferably in a pattern having the same distribution pitch P as the membranes, in each of the dimensions of the plane of the substrate.
    Preferably, each pixel of the detector 100 comprises at least one through opening 1102.
    The through openings 1102 allow in particular to evacuate a sacrificial material used for the manufacture of the detector 100.
    They are then recapped, here by a transparent covering layer 111, covering the cover (without covering the connection pads).
    The plugging layer 111 may also have an optical function, for example an anti-reflection or spectral filtering function.
    According to variants not shown, thin layers, distinct from the plugging layer 111, can extend above the cover 110, for example an anti-reflective treatment layer, and / or a spectral filter.
    The through openings 1102 preferably extend with respect to regions located between the membranes 108.
    This positioning avoids any degradation of the membranes during a step of filling the through openings 1102, a part of the filling material being able to fall on the membranes if the latter are facing the through openings.
    This positioning implies a spacing between the membranes 108, at least equal to the diameter of a through opening 1102.
    However, the diameter of a through opening 1102 can be very small, for example 0.5 μm, thanks to the reduced thickness of the cover 110. The minimum diameter of a through opening is indeed a function of the thickness of the cover , the ratio of the thickness divided by said minimum diameter being approximately equal to 10.
    It is thus possible to obtain a high surface occupation rate by the membranes 108, while having a low pitch of distribution of the membranes, and through openings 1102 with regard to the spaces between the membranes.
    The small diameter of a through opening also makes it possible to avoid any optical disturbance of an electromagnetic radiation to be detected, the diameter of the latter remaining small compared to the wavelengths detected by the detector 100.
    The detector 100 further comprises a first sealing layer 112A and a second sealing layer 112B.
    The two sealing layers 112A, 112B are made of metal, superimposed and glued to one another.
    By "bonded" means fixed one on the other, for example by hybrid bonding or by bonding involving a fusion of material.
    This bonding results in a bonding zone 112C, called peripheral, between these two layers.
    The two sealing layers 112A, 112B extend between the support wall 106 and the cover 110.
    In particular, the first sealing layer 112A extends in direct physical contact with an upper face of the support wall 106, here an upper face of the upper plate 1064, on the side opposite to the substrate 101.
    The first sealing layer 112A extends along a closed loop path, and delimits above the substrate 101 the same surface as that delimited by the support walls 106.
    The second sealing layer 112B here extends in direct physical contact with a lower face of the cover 110.
    It is only separated from the first sealing layer 112A by the peripheral bonding zone 112C.
    The peripheral bonding zone 112C consists for example of a thin metallic layer, of a metal different from that of the first and second sealing layers, or of a thin layer of the metal of said sealing layers having melted during a bonding step. Where appropriate, the two sealing layers may be in direct physical contact with each other, the peripheral bonding zone simply corresponding to an interface between these two layers, bonded one on the other without an intermediate layer of bonding.
    The second sealing layer 112B is superimposed on the first sealing layer 112A, and extends along the same path. It therefore extends along a closed loop path, and delimits above the substrate 101 the same surface as that delimited by the support walls 106.
    The first and second sealing layers 112A, 112B together form a peripheral bead, around the membranes 108.
    They are made of metal, composed of a single metal or a metal alloy, or composed of a stack of metals or metal alloys. They include one or more metals such as for example copper, titanium nitride, tantalum nitride, nickel, gold, indium, tin or a tin-based alloy such as CuSn or the AuSn. The cumulative thickness of the two sealing layers 112A, 112B is of the order of 2 μm.
    This thickness here corresponds to the distance between the membranes 108 and the cover 110, denoted “e” in FIG. IA.
    Likewise, the detector comprises pairs of first and second sealing studs 114A, 114B.
    Each pair extends between the cover and a support pillar 104, all the support pillars 104 being surmounted by one of these pairs.
    As specified with regard to the support pillars 104, these sealing studs are not necessarily necessary, for detectors having a reduced number of pixels.
    In each pair, the first and second sealing studs 114A, 114B are superimposed, and fixed to each other by gluing.
    They have the same metallic composition as the two sealing layers.
    They also have the same cumulative thickness as the two sealing layers.
    The first and second sealing studs 114A, 114B each have a section of diameter substantially equal to that of a support pillar, for example 1 μm, and in any event less than 3 μm.
    Each first sealing stud 114A extends in direct physical contact with a support pillar 104, in particular an upper face of the upper plate 1041 of this support pillar.
    Each second sealing stud 114B extends in direct physical contact with the cover 110.
    Each second sealing stud 114B is separated from the corresponding first sealing stud by an internal bonding zone 114C, of the same kind as the peripheral bonding zone 112C.
    The cover is supported in abutment on the first and second sealing layers 112A, 112B, located themselves on the support walls, and on the first and second sealing studs 114A, 114B, themselves located on the support pillars .
    The first and second sealing layers 112A, 112B define, with the support walls 106, the side walls of a hermetic cavity 115 receiving the membranes 108.
    On the side opposite the substrate, this hermetic cavity 115 is closed by the cover 110.
    The first and second sealing layers 112A, 112B, participate in the hermeticity of the cavity 115, in addition to their mechanical support function.
    A vacuum is created in the hermetic cavity 115 by the through openings 1102, before their plugging by the layer 111. The cumulative thickness of the first and second sealing layers, as mentioned above, is high enough for the elimination by etching the materials between the membrane and the cover does not pose any difficulties.
    It is noted here that this thickness is also thin enough so that the production of the first and second sealing layers, and of the first and second sealing pads, does not pose any technological difficulty. This thickness allows, for example, the use of mechanical chemical polishing (CMP) processes.
    Here, a getter material 113 is placed against the cover 110, inside the cavity 115, to maintain the quality of the vacuum over time in the cavity 115.
    A getter material, or gas trap, limits the appearance of gas in an enclosure. It can be an easily oxidizable metal such as titanium, or vanadium, zirconium, cobalt, iron, manganese, aluminum or an alloy of these metals.
    The getter material 113 extends into the cavity 115.
    It forms for example two bars parallel to each other, extending along two opposite edges of the membrane matrix, the connection pads 109 extending along the two other edges of the membrane matrix. This example is not limitative. The getter material can also, for example, be positioned on the side of the substrate.
    For the sake of illustration, the getter material is not positioned in the same way in FIG. 1A, in order to be able to illustrate it at the same time as the connection pads 109.
    The detector 100 is adapted to detect electromagnetic radiation propagating orthogonal to the plane of the substrate 101, and incident on the membranes from the side opposite to the substrate 101.
    FIGS. 2A to 2C illustrate a second embodiment of a detector according to the invention.
    FIG. 2A schematically represents a pixel of such a detector, according to a top view.
    Each pixel receives a single membrane 108, supported on two support pillars 105.
    FIG. 2B represents a simplified sectional view of this pixel, in a vertical plane BB ′ passing a first support pillar 105.
    FIG. 2C represents a simplified sectional view of this pixel, in a vertical plane CC 'parallel to the plane BB' and passing through the other support pillar 105.
    According to this second embodiment, in each pixel, one of the support pillars 105 of the membrane also forms a support pillar 104, to support the cover 110.
    In practice, one of the support pillars 105 is simply surmounted by a first and a second sealing studs 114A, 114B as described above.
    Preferably, all the support pillars under the hood also form a support pillar for a membrane.
    Thus, a surface filling rate by the membranes 108 is not limited by the size of support pillars 104 distinct from the support pillars of the membranes.
    According to this embodiment, electrical insulation is necessary, to avoid electrically connecting the membranes 108, by means of the cover 110 and the pairs of first and second sealing studs 114A, 114B.
    An electrical insulation pad 116 therefore extends with respect to each pair of first and second sealing pads 114A, 114B.
    Here, a respective insulation pad 116 extends under each pair of first and second sealing pads 114A, 114B. The insulation stud 116 here extends between the support pillar 104 (also the support pillar) and the first sealing stud. According to a variant not shown, the insulation stud 116 extends between the cover 110 and the second sealing stud 114B.
    The isolation pad 116 is for example made of dielectric material, for example SiC, SiCN, SiOC, AI2O3, AIN, etc. It is preferably a material resistant to etching used for the removal of a sacrificial layer, during the manufacture of the detector, in particular a material resistant to etching by hydrofluoric acid vapor (HF ).
    According to the second embodiment illustrated in FIGS. 2A to 2C, each pixel has a single event 1102, located above the other of the support pillars 105 supporting the membrane 108. The vent, or through opening 1102, does not not project laterally relative to the support pillar, which is possible thanks to the small diameter of the vent, itself made possible by the small thickness of the cover.
    In particular, the diameter of the support pillar 105 is of the order of 1 μm. The diameter of the event is of the order of 0.5 μm, and an alignment accuracy of one relative to the other may be less than 0.2 μm.
    The membrane 108 is suspended in abutment on the support pillars 105, by means of arms 1081, which extend laterally, parallel to the plane of the substrate 101. Consequently, each through opening 1102 thus positioned does not extend with regard to a membrane.
    This positioning of the through openings 1102 allows the surface filling rate by the membranes 108 not to be limited by the presence of the through openings 1102.
    According to variants not shown, the detector may have only the characteristic relating to the positioning of the through openings, or only the characteristic relating to the support pillars.
    FIGS. 3A and 3B illustrate the steps of a method for manufacturing a detector according to the invention.
    There is shown on the left, steps implemented above a first substrate, called the main substrate 101, corresponding to the substrate as described with reference to FIG. 1.
    In a first step 31, a stack is produced, comprising superimposed: the main substrate 101, comprising reading circuits; the intermediate layer 102, as described with reference to FIG. IA; the protective layer 103, as described with reference to FIG. IA; the different vertical structures as described with reference to FIG. 1A (support pillars 105, support pillars 104, support walls 106, and elevation blocks 107), formed in a sacrificial layer 120 called sacrificial membrane layer; and the membranes 108 and the connection pads 109 as described with reference to FIG. 1.
    The vertical structures are formed by etching trenches in the sacrificial layer 120, and depositing material to fill the trenches.
    The support walls 106 and the elevation blocks can each be formed by etching several trenches in the sacrificial layer 120, in order to ultimately obtain structures as described with reference to FIG. IA. It is thus possible to make structures larger than the support pillars and support pillars, using the same etching step as for said pillars.
    The sacrificial layer 120 extends up to the height of the lower faces of the membranes 108, on the side opposite to the main substrate 101.
    The membranes 108 are produced by lithography and etching, above the sacrificial layer 120.
    The production of the stack will not be described here further, since it corresponds to known stages of manufacturing a bolometric type detector, except that other vertical structures are produced in addition to the support pillars for membranes.
    Next, a new sacrificial layer, called the first sacrificial stop layer 121, is deposited, covering the membranes 108 and the connection pads 109 (step 32).
    Then, in a step 33, the first sacrificial stop layer 121 is etched above the support pillars 104 and the support walls 106, and the etched openings are filled with metal to form the first sealing studs 114A, and the first sealing layer 112A.
    The method for producing the first sealing pads and the first sealing layer 112A, 114A implements so-called damascene methods, with metal deposition and then planarization to obtain pads and a layer flush with the surface of the first sacrificial layer of stop 121, on the side opposite to the substrate 101. The stack obtained at the end of step 33 is said to be sensor stack 117.
    Independently of steps 31 to 33, a second series of steps is implemented, involving a second substrate, called transfer substrate 130.
    The transfer substrate 130 is for example made of silicon, or glass, and has no integrated circuit. In step 34, an intermediate sacrificial layer 131 is deposited on the substrate 130, then a so-called cover layer 132 on the intermediate sacrificial layer 131.
    The material and the thickness of the cover layer correspond to the material and the thickness of the cover described with reference to FIG. IA.
    As a variant, the layers 130, 131 and 132 can come from an SOI (silicon on insulator) or GOI (germanium on insulator) substrate. In step 35, the cover layer 132 is etched, then a new sacrificial layer 133, called the sacrificial cover layer, is deposited to fill the openings etched in the cover layer 132.
    Etching consists in delimiting the external contours of the cover as described with reference to FIG. IA, and in forming the through openings 1102 of the cover.
    In particular, there is defined a cover configured not to cover the connection pads 109, at the end of the steps for manufacturing the detector according to the invention.
    The sacrificial cover layer 133 and the etched cover layer together form a flat surface, on the side opposite to the transfer substrate 130. At the end of step 35, we therefore produced, above the transfer substrate 130 , a layer 134 comprising regions made of sacrificial material and cover regions transparent to wavelengths to be detected.
    The regions made of sacrificial material are intended to form through openings in the cover, respectively regions of access to the connection pads 109.
    In a step 36, a second sacrificial stop layer 135 is deposited above the layer 134.
    In a step 37, the second sacrificial stop layer 135 is etched at the locations of the second sealing layer and of the second sealing pads as described with reference to FIG. IA, then the etched openings are filled with metal to form said studs and layer 114B, 112B. Again, damascene methods known to those skilled in the art are implemented, in order to obtain pads and a layer flush with the surface of the second sacrificial stop layer 135, on the side opposite to the transfer substrate 130.
    The etched openings are positioned so as to be found above the first sealing layer, respectively of the first sealing pads, when the transfer substrate is turned over and placed above the main substrate 101.
    At the end of step 37, a stack called transfer stack 136 is obtained.
    Steps 31 to 33 on the one hand, and 34 to 37 on the other hand, can be implemented in parallel, or one after the other, first steps 31 to 33 or first steps 34 to 37.
    The various sacrificial layers are preferably made of dielectric material, in particular of silicon dioxide S1O2.
    The two sacrificial stop layers define the height of the sealing layers and studs 114A, 112A, 114B, 112B. They also serve as a stop layer for damascene processes, and participate in the definition of a flat mechanical support for the subsequent transfer of the cover.
    Figure 3B illustrates the subsequent steps of the process. In step 38, the transfer stack 136 is returned and it is deposited on the sensor stack 117, so that the first and second sealing layers 112A, 112B, and the first and second sealing pads 114A, 114B , be aligned two by two, and in direct physical contact two by two.
    The layer 134 as described above extends above the sensor stack 117 so that the cover regions extend above the membranes 108, and the regions made of sacrificial material extend above connection pads 109 as well as at the locations of future through openings in the cover.
    The alignment precision is of the order of 0.2 μm. The sensor stack 117 and the transfer stack 136 are fixed together by bonding without an adhesive intermediate layer, called hybrid bonding, or in English “hybrid bonding”.
    The binding uses attractive forces such as Van der Waals forces and hydrogen bonds.
    Fixing does not necessarily imply high temperature heating. In particular, the temperature remains strictly below 300 ° C.
    This bonding is said to be “hybrid”, since it involves both the material of the first and second sacrificial stop layers, and the material of the sealing layers and pads 112A, 112B, 114A; 114B.
    Copper-copper hybrid bonding and silicon dioxide on silicon dioxide is known to those skilled in the art, and will not be described more fully below.
    If necessary, the skilled person can refer for example to the following article: "Advance Toward Reliable High Density Cu-Cu Interconnects by Cu-SiO2 Direct Hybrid Bonding", Y Beilliard & al., published in 3D Systems Integration Conference (3DIC), 2014 International, IEEE.
    In a step 39, the transfer substrate 130 is removed, for example by mechanical polishing (grinding) and wet etching.
    Then, in step 40, the various sacrificial layers are etched, here by etching with hydrofluoric acid in the value phase, and removed.
    In particular, the following is etched: the intermediate sacrificial layer 131, formed in step 34; the sacrificial cover layer 133, formed in step 35; the first and second sacrificial stop layers 121, 135, formed in steps 32, respectively 36; and the sacrificial membrane layer 120 formed in step 31.
    All these sacrificial layers are etched and removed, except, where appropriate, portions of the sacrificial membrane layer 120, located between elementary walls of the support walls, and between elementary walls or pillars of the elevation blocks.
    In particular, the sacrificial cover layer is etched, so that only the cover remains. In other words, the regions of sacrificial material situated above the connection pads are eliminated, and the sacrificial material situated in the through openings 1102 is eliminated.
    The portions of sacrificial layers located under the cover 110 are etched and evacuated through openings 1102 formed in the cover 110.
    Thus, the same etching and evacuation step of sacrificial material makes it possible both to free up the space under the cover, above and below the membranes, and to free up regions above the connection pads.
    The method then comprises conventional steps, not shown, of putting under vacuum, and depositing a sealing layer on the cover to close the through openings 1102.
    A getter material, not shown, can be deposited on the layer 134, before the step 38 of substrate transfer. This getter material must be covered with a protective layer during the etching of the sacrificial layers, the protective layer can then be removed.
    Texturing steps and / or deposition of treatment layers (optical filter, anti-reflection, etc.) can be implemented on the cover, before step 38 of substrate transfer and / or after step 39 of removal of the substrate 130.
    Although this example is not limiting, the invention preferably relates to a detector produced using mineral sacrificial layers etched by hydrofluoric acid vapor.
    According to the invention, the cover is therefore deposited not directly above the sensitive elements, but above a transfer substrate. Consequently, a deposition temperature of the thin layer forming the cover is not liable to damage these sensitive elements. The choice of materials which can constitute the sensor is therefore not limited by a deposition temperature. In particular, it is not necessary to limit oneself to materials having a reduced deposition temperature, for example less than 400 ° C. or even less than 300 ° C.
    The cover according to the invention is produced by depositing a layer on a flat surface. Thus, the choice of material (x) constituting the cover is also not limited by a requirement of conformity relative to a non-planar deposition surface.
    FIG. 4 illustrates a variant of the method illustrated in FIGS. 3A and 3B, in which, during the step of transferring the substrate 130 above the membranes 108, the first sealing layers and pads 112A, 114A are not surrounded by sacrificial material and are surrounded by the surrounding gaseous medium.
    Similarly, during this step of transferring the substrate 130, the second sealing layers and studs 112B, 114B are not surrounded by sacrificial material and are surrounded by the surrounding gaseous medium.
    In this case, the bonding between the sealing layers and between the sealing pads is not a hybrid bonding, but a conventional hybridization by fusion or thermocompression, using indium or tin pads.
    However, it is still a bonding without heating to 300 ° C or more.
    This variant, which is less preferred, may be advantageous in particular when the sacrificial membrane layer and the sacrificial cover layer are formed from an organic material such as a polyimide, and then etched by oxygen plasma.
    According to another variant, not shown, the sacrificial membrane layer is removed before the substrate 130 is transferred.
    FIG. 5 illustrates another variant of the method, in which the cover layer 132 is not etched before the step of transferring the substrate 130, but after removal of this substrate.
    Finally, FIGS. 6A and 6B schematically illustrate the simultaneous production of several detectors according to the invention.
    FIG. 6A illustrates, according to a top view, a layer 134 comprising regions made of sacrificial material and hood regions, together delimiting a matrix of hoods. Each hatched area corresponds to a transparent cover.
    FIG. 6B illustrates, in a sectional view, a stack comprising a transfer substrate 130, an intermediate sacrificial layer, and said layer 134.
    Several transfer stacks are thus produced as described above, sharing the same transfer substrate, and deposited together above several sensor stacks sharing the same main substrate. The alignment between the main substrate and the transfer substrate is carried out only once, to manufacture several detectors according to the invention. The invention therefore offers a clever solution for hermetic packaging for an electromagnetic radiation detector with suspended membrane (s).
    It is a so-called "wafer level" packaging, in which, if the detector has several membranes, these are encapsulated together in the same hermetic cavity. The invention is particularly advantageous in the context of suspended membranes produced using an inorganic sacrificial layer released by HF etching. The invention is not limited to the examples described here, and numerous variants can be implemented without departing from the scope of the invention.
    For example, the number of support pillars under the hood can be adjusted depending on the rigidity of the hood and the height of the cavity under the hood.
    The detector according to the invention may not have support pillars or first and second sealing studs, in particular if the rigidity of the cover is sufficient with regard to its lateral dimensions.
    The detector 100 according to the invention can form an infrared imager, a thermal imager (thermography), an infrared sensor (which can then comprise only a single pixel), a tera-Hertz sensor, a gas detector (by measuring optical absorption in the infrared spectrum), a person or object detector, a device for recognizing people or objects, a motion detector in the infrared spectrum (for example for detecting human activity), etc.
    权利要求:
    Claims (15)
    [1" id="c-fr-0001]
    1. An electromagnetic radiation detector (100) comprising: at least one membrane (108) suspended above a substrate (101), configured to absorb and convert incident electromagnetic radiation into heat; and a cover (110), transparent in a spectral sensitivity range of the electromagnetic radiation detector, and closing a hermetic cavity (115) receiving the at least one membrane; characterized in that: the cover (110) has a thickness (E) less than or equal to 10 μm; the cover is suspended above the substrate, bearing at least on support walls (106) framing the membrane (s); the detector (100) has first and second sealing layers (112A, 112B), metallic, interposed one on the other between the cover and the support walls, and between which extends a peripheral bonding area (112C).
    [2" id="c-fr-0002]
    2. Detector (100) according to claim 1, characterized in that: the cover (110) is suspended above the substrate, bearing on the support walls (106), and on support pillars (104) located between the support walls; and the detector comprises pairs of first and second sealing studs (114A, 114B), metallic, each pair being located between the cover and one of the support pillars (104), the first and second sealing studs of each pair being superimposed and separated by a respective internal bonding area (114C).
    [3" id="c-fr-0003]
    3. Detector (100) according to claim 2, characterized in that it has a plurality of membranes (108) suspended above the substrate, a pitch (P) of distribution of the membranes being equal to a distribution pitch of the pillars support (104), in each dimension of the plane of the substrate.
    [4" id="c-fr-0004]
    4. Detector (100) according to claim 2 or 3, characterized in that the membrane (s) (108) are suspended (s) above the substrate, each bearing on support pillars (105) , and in that for each membrane, one of the support pillars is surmounted by a pair of first and second sealing studs (114A, 114B), so that said support pillar also forms a support pillar ( 104) for the cover.
    [5" id="c-fr-0005]
    5. Detector (100) according to any one of claims 1 to 4, characterized in that the cover (1110) has one or more opening (s) through (s) (1102).
    [6" id="c-fr-0006]
    6. Detector (100) according to claim 5, characterized in that the membrane (s) (108) are suspended (s) above the substrate, each bearing on support pillars (105), and in that for each membrane, one of the support pillars (105) is surmounted by a through opening (1102) of the cover.
    [7" id="c-fr-0007]
    7. Detector (100) according to any one of claims 1 to 6, characterized in that a cumulative thickness of the first and second sealing layers (112A, 112B) is between 1.5 pm and 2.5 pm .
    [8" id="c-fr-0008]
    8. Method for encapsulating at least one sensitive element of a detector (100) of electromagnetic radiation, characterized in that it comprises the following steps: a) making a stack, called sensor stack (117), comprising: a first substrate (101), said main substrate; at least one membrane (108) extending over the main substrate, forming the at least one sensitive element of the electromagnetic radiation detector, and configured to absorb and convert incident electromagnetic radiation into heat; support walls (106), extending above the main substrate and framing the at least one membrane; and a first sealing layer (112A), metallic, located above the upper faces of the support walls, on the side opposite to the main substrate; b) deposition, above a second substrate (130) called transfer substrate, of a layer called cover layer (132), transparent in a spectral sensitivity range of the electromagnetic radiation detector, and of lesser thickness or equal to 10 pm; c) production, on the cover layer, of a second sealing layer (112B), metallic; d) transfer of the transfer substrate (130) onto the main substrate (101), so as to align and bond one to the other, the first sealing layer (112A) and the second sealing layer (112B); and e) removing the transfer substrate (130).
    [9" id="c-fr-0009]
    9. Method according to claim 8, characterized in that: the sensor stack (117) further comprises support pillars (104), extending between the support walls, and each surmounted by a respective first sealing stud (114A); step c) also comprises the production, on the cover layer, of second sealing studs (114B); and step d) also realizes alignment and bonding, two by two, the first sealing studs (114A) with the second sealing studs (114B).
    [10" id="c-fr-0010]
    10. The method of claim 8 or 9, characterized in that it further comprises a step of etching the cover layer (132), to delimit the external contour of a cover (110) intended to close a cavity receiving the at least one membrane, and to form in this cover at least one through opening (1102).
    [11" id="c-fr-0011]
    11. Method according to claim 10, characterized in that the step of etching the cover layer is carried out after step e) of removing the transfer substrate.
    [12" id="c-fr-0012]
    12. Method according to claim 10, characterized in that: the step of etching the cover layer is carried out after step b) of depositing the cover layer (132) and before step d) transferring the transfer substrate (130); the step of etching the cover layer is followed by a step of filling the etched regions with a layer of sacrificial material, called the sacrificial cover layer (133); and the cover sacrificial layer (133) is removed after step e) of removing the transfer substrate.
    [13" id="c-fr-0013]
    13. Method according to any one of claims 8 to 12, characterized in that: the method comprises steps of depositing layers of sacrificial material, called stop sacrificial layers (121, 135), so that before l step d) of transfer of the transfer substrate, the first sealing layer (112A) and the second sealing layer (112B) are each located in one of these sacrificial stop layers; step d) uses hybrid bonding; and the sacrificial stop layers (121,135) are removed after step e) of removal of the transfer substrate.
    [14" id="c-fr-0014]
    14. Method according to any one of claims 8 to 13, characterized in that in the sensor stack (117), at the end of step a), the at least one membrane (108) extends above a sacrificial layer, called sacrificial membrane layer (120), the sacrificial membrane layer being removed after step e) of removing the transfer substrate.
    [15" id="c-fr-0015]
    15. Method according to any one of claims 8 to 14, characterized in that it is implemented simultaneously for several sensor stacks (117) sharing the same main substrate (101), and using a single transfer substrate (130) and a single cover layer (132), a step of etching the cover layer delimiting the external contours of several covers (110) each intended to cover one of the several sensor stacks.
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    同族专利:
    公开号 | 公开日
    CN108982973A|2018-12-11|
    FR3066044B1|2020-02-21|
    CN108982973B|2021-06-11|
    US10168223B2|2019-01-01|
    US20180321087A1|2018-11-08|
    EP3399290A1|2018-11-07|
    KR102057714B1|2019-12-19|
    KR20180122287A|2018-11-12|
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    法律状态:
    2018-05-28| PLFP| Fee payment|Year of fee payment: 2 |
    2018-11-09| PLSC| Publication of the preliminary search report|Effective date: 20181109 |
    2019-05-31| PLFP| Fee payment|Year of fee payment: 3 |
    2020-05-30| PLFP| Fee payment|Year of fee payment: 4 |
    2021-05-31| PLFP| Fee payment|Year of fee payment: 5 |
    优先权:
    申请号 | 申请日 | 专利标题
    FR1753843|2017-05-02|
    FR1753843A|FR3066044B1|2017-05-02|2017-05-02|ELECTROMAGNETIC RADIATION DETECTOR, ENCAPSULATED BY THIN FILM DEFERRATION.|FR1753843A| FR3066044B1|2017-05-02|2017-05-02|ELECTROMAGNETIC RADIATION DETECTOR, ENCAPSULATED BY THIN FILM DEFERRATION.|
    US15/962,549| US10168223B2|2017-05-02|2018-04-25|Electromagnetic radiation detector encapsulated by transfer of thin layer|
    EP18170014.7A| EP3399290A1|2017-05-02|2018-04-30|Electromagnetic radiation detector, encapsulated by adding a thin layer|
    KR1020180050109A| KR102057714B1|2017-05-02|2018-04-30|Electromagnetic radiation detector encapsulated by transfer of thin layer and method of encapsulating at least one sensitive element of the electromagnetic radiation detector|
    CN201810411576.5A| CN108982973B|2017-05-02|2018-05-02|Electromagnetic radiation detector encapsulated by thin layer transfer|
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